Equipped for imaging, x-ray microanalysis (surface and STEM), electron backscatter diffraction (EBSD and TKD)

Schottky-based field-emission electron source with compound electrostatic-magnetic final lens provides 0.8nm resolution at 30keV (STEM) and 0.8 nm at 500V.
Charge free imaging of insulating samples
Low vacuum mode: 10 – 500 Pa chamber pressure
Backscatter/channeling contrast imaging even at low kV
EDAX APEX Integrated EDS-EBSD with Octane Elite-25 EDS Detector and Velocity Super CMOS EBSD camera
EDAX energy dispersive x-ray system with Octane Elite detector with point, line, and mapping analysis.
EDAX high-speed orientation imaging Velocity Super CMOS camera system for collecting and analyzing EBSD patterns to determine sample phases, orientation distributions, textures, twins and grain boundaries, grain size distributions, etc.
Nav-Cam+
20eV-30keV landing energy range
Beam deceleration from -4000V to +600 V
Large Cha5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Cathodoluminescence detector describes the emission of light from a material when it is excited by the electron beam.
Pivotbeam mode for more straightforward ECCI imaging.
Schottky-based field-emission electron source with compound electrostatic-magnetic final lens provides 0.8nm resolution at 30keV (STEM), 1. nm at 100V.
Charge free imaging of insulating samples
Low vacuum mode: 10 – 500 Pa chamber pressure
Backscatter/channeling contrast imaging even at low kV
Oxford Aztec Integrated EDS-EBSD with some kind of EDS Detector and Symmetry CMOS EBSD camera
Oxford energy dispersive x-ray system with some kind of detector with point, line and mapping analysis.
Oxford high-speed orientation imaging Symmetry CMOS camera system for collecting and analyzing EBSD patterns to determine sample phases, orientation distributions, textures, twins and grain boundaries, grain size distributions, etc.
Cathodoluminescence detector describes the emission of light from a material when it is excited by the electron beam.
Nav-Cam+
20eV-30kEv landing energy range
Beam deceleration from -4000V to +600 V
Large Chamber 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Schottky-based field-emission electron source 1.4 nm resolution at 30keV (STEM)
Backscatter/channeling contrast imaging
EDAX APEX Integrated EDS-EBSD with Octane Elite-25 EDS Detector and Hikari Super EBSD camera
EDAX energy dispersive x-ray system with Octane Elite detector with point, line, and mapping analysis.
EDAX high-speed orientation imaging Hikari Super camera system for collecting and analyzing EBSD patterns to determine sample phases, orientation distributions, textures, twins and grain boundaries, grain size distributions, etc.
200eV-30kEv landing energy range
Beam deceleration from -4000V to +600 V
Large Cha5-axis motorized eucentric stage, 50 x 50 mm2 with a 75° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Apreo S, Apreo 2 S, and Inspect F SEMs