JEOL 840 EPMA with Wavelength Dispersive Spectroscopy
This is a SEM fitted with three wavelength spectrometers and a total of eight crystals, covering the periodic table from beryllium to uranium. With appropriate standards quantitative measurements can be obtained on both light and heavy elements. Superior energy resolution and signal to background gives this quantitative technique an advantage over EDS. There is also greater flexibility in choice of standards and ZAF correction schemes.